3D InCites Podcast

Monita Pau and Jiangtao Hu Talk About Addressing The Challenges of Metrology for Advanced Packaging

Francoise von Trapp / Monita Pau / Jiangtao Hu Season 4 Episode 31

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In this episode, Françoise von Trapp talks with Onto Innovation’s Monita Pau and Jiangtao Hu about metrology for advanced packaging – why do we need it? What are the challenges, and how do we solve them? 
 
 In semiconductor manufacturing front-end processes, metrology has always been a critical step to ensure consistency of very fine features. It’s only recently become important to back-end advanced packaging processes – especially for heterogeneous integration. As chips are designed with smaller features, advanced packaging processes are becoming more front-end like. 

You’ll learn about how metrology designed for front-end manufacturing is being reimagined for wafer-level and assembly applications such as:

  • Hybrid bonding
  • 3D stacking with micro bumps
  • RDL applications for interposers
  • TSV applications

The speakers discuss the challenges, gaps, and solutions for each. You’ll also learn what makes Onto Innovation uniquely qualified to support this. 

Contact Our Guests on LinkedIn 

·       Monita Pau

·       Jiangtao Hu

Onto Innovation
Your partner for innovative solutions that improve time to market, yield, and product reliability.

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